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Semiconductor · Materials
SiC Product
SiC parts and coated products made by CVD process. Longer life than silicon with no thermal deformation.
SiC Parts
SiC Coated Product
Product Overview SiC coated parts manufactured with CVD process to prevent out gassing and particle from raw materials (Graphite). It is used as a key part in CVD process in each field and is produced using Graphite as raw material.
CVD SiC Ring
Product Overview Bulk SiC products manufactured with CVD process to improve life time and yield for parts used in Semiconductor processes.
Product Characteristics
- Life time: 1.5 times longer than Si (Up to 10 times)
- Super pure: Purity of 99.999% (No Particle)
- Excellent hardness and strength compared to Si, high corrosion resistance.
- No thermal deformation and strong at high temperature