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Semiconductor · Equipment
Package EMI Sputter System
Cubicle-type sputtering system for package EMI shielding. Applied to package, glass and wafer substrates.
ShieldRus-1200/1200s
Cubicle type sputtering system
- Substrate: PKG, Glass, Wafer
- Thickness non-uniformity : ≤ ± 5%
- Application : PKG EMI, Solar, DisplayCustomers: Samsung, Qualcomm, Skyworks, SK Hynix, ASE, Hwawei